Evaluation of the measurement uncertainty of a high-precision telescopic instrument for machine tool verification
Interferometry;Machine;Uncertainty;Verification
Interferometry;Machine;Uncertainty;Verification
Alloy;Drive;3D printing
Micromachining;Microstructure;Polymer;Texture
Actuator;Friction;Piezo-electric;Positioning
Alignment;Coordinate measuring machine (CMM);Laser;Positioning
Acoustic;Artificial intelligence;Monitoring;Surface
Actuator;Friction;Mechatronic;Piezo-electric