Control waveform and frequency of an inchworm-type actuator using piezoelectric element
Actuator;Friction;Piezo-electric;Positioning
Actuator;Friction;Piezo-electric;Positioning
Alignment;Coordinate measuring machine (CMM);Laser;Positioning
Acoustic;Artificial intelligence;Monitoring;Surface
Actuator;Friction;Mechatronic;Piezo-electric
Manufacturing (CAM);Ecology;Numerical control (NC);Simulation
Control;Performance;Positioning;Ultra-precision
Compensation;In-process measurement;Micromachining;Optical