Design of a contactless handling system using compliant surface elements
Actuator;Handling;Vacuum;Wafer
Actuator;Handling;Vacuum;Wafer
Finite element method (FEM);Modelling;Nano indentation
Acoustic;Grinding;Monitoring;Predictive
Aluminium;In-process measurement;Surface;Turning
Atomic force microscopy (AFM);Monitoring;Nano manufacturing;Oxidation
Deposition;Electrical discharge machining (EDM);Microstructure;Welding
Computer aided design (CAD);Design;Finite element method (FEM);Mechanical
Automation;Hexapod;Positioning;Precision