2011

|2011

Hexapod Systems for UHV Applications with Active Vibration Damping

An Inchworm-type Microactuator Using Levitation Mechanisms

Design and Optimization of a Novel Compact and Long-range 3-DOF Flexure Stage

Development of Micro-Object Position Detection System for the Automation of Robot Hand

New Concept for Simplified Recalibration of Hexapod Positioning Units in Industrial Environment

New Approach to Overcome the Limitations in Small Torque Realization

Position Control of a MEMS Stage with Integrated Sensor

A Novel Approach in the Application of Flexure Bearings in Primary Torque Standard Machines

Precision Pointing and Stability Control of the Future Linear Collider Quadrupoles

Active Guides for Precision Micro-systems

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