2011

|2011

Miniature 3-DOF Planar Parallel Kinematics with Large Workspace for Precision Positioning of Endeffectors

Reconfigurable Machine-Tool for Micro Machining

Ultraprecision Control of A Hydrostatic Bearing Guided Machine with Position Stability Analysis

Performance Evaluation and Improvement of a Dual-frequency Laser Interferometer for Nano Positioning Stage

Flexure Based Feed Unit – A Progress Report

Design of Feedback Control System for Water Driven Stage

Prediction of 5-DOF Motion Errors of Hydrostatic Bearing Tables and Its Experimental Verification

Simultaneous Measurement of Warp and Thickness of Large-Diameter Silicon Wafer Using Three-Point-Support Inverting Method

Development and Integration of a Method to Support Dynamical Analyses of Micro Gears in Functional Testings

A Method for Tensile Testing of Delicate Polymeric Specimens

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