2011

|2011

Characterization of Multifunctional Surfaces During Fabrication

Comparison of Dimensional Measurements of Microparts Made Using Deepx-ray Lithography (LIGA): First Results

Development of a High-Resolution Positioner for 3D Nanometrology of Microparts

Probing Behaviour of a Micro CMM

A Newly Developed AFM-based Three Dimensional Profile Measuring System

Experimental Investigation on 3D-SEM Reconstructions of a Wire Gauge Using Stereo-pair Technique

Investigation of the Cutting Behavior of Piezoelectric Ceramics during Grinding with Diamond Pins

Design and Construction of a Laser Scanning Microscope for Surface Metrology

Evaluation of the Capacitive Displacement Measurements in Mechanical Metrology with Cylindrical Artefacts

Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices: Error Analysis and Experiments

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